図書

Reliability, packaging, testing, and characterization of MEMS/MOEMS 6 : 23-24 January 2007 : San Jose, California, USA. : reliability, packaging, testing, and characterization of MEMS/MOEMS conference : photonics west 2007 : MOEMS-MEMS 2007 micro-nano fabrication symposium : Jan 2007, San Jose, CA. (SPIE Proceedings ; 6463)

Icons representing 図書

Reliability, packaging, testing, and characterization of MEMS/MOEMS 6 : 23-24 January 2007 : San Jose, California, USA. : reliability, packaging, testing, and characterization of MEMS/MOEMS conference : photonics west 2007 : MOEMS-MEMS 2007 micro-nano fabrication symposium : Jan 2007, San Jose, CA.

(SPIE Proceedings ; 6463)

Call No. (NDL)
M17-07-998
Bibliographic ID of National Diet Library
000008514863
Material type
図書
Author
Hartzell, Allyson L.ほか
Publisher
SPIE
Publication date
c2007.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 28 cm.
NDC
-
View All

Notes on use

Note (General)：

Papers."This conference has been held for several years in row." -- introd.

Search by Bookstore

Search by Bookstore

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
図書
ISBN
9780819465764
ISSN (series)
0277-786X
Title
Reliability, packaging, testing, and characterization of MEMS/MOEMS 6 : 23-24 January 2007 : San Jose, California, USA. : reliability, packaging, testing, and characterization of MEMS/MOEMS conference : photonics west 2007 : MOEMS-MEMS 2007 micro-nano fabrication symposium : Jan 2007, San Jose, CA.
Series Title
SPIE Proceedings ; 6463
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 6463.
Author Heading
Hartzell, Allyson L.
Ramesham, Rajeshuni.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2007.
Publication Date (W3CDTF)
2007