Frontiers of characterization and metrology for nanoelectronics : 2007 international conference on frontiers of characterization and metrology for nanoelectronics : Gaithersburg, Maryland 27-29 March 2007. : Mar 2007, Gaithersburg, MD.
Frontiers of characterization and metrology for nanoelectronics: 2007 : March 27-29 : National Institute of Standards and Technology : Gaithersburg, Maryland