Analytical and diagnostic techniques for semiconductor materials, devices, and processes 7. : analytical and diagnostic techniques for semiconductor materials, devices, and processes/7 symposium : fall 2007 Electrochemical Society meeting : ALTECH 07 symposium analytical techniques for semiconductor materials and process characterization 5 : symposium E3 diagnostics : Oct 2007, Washington, DC.

• 資料種別: 図書
• ISBN: 9781566775694; 9781566775793 (CD-ROM)
• ISSN: 1938-6737 (online)
• ISSN（シリーズ）: 1938-5862 (print)
• タイトル: Analytical and diagnostic techniques for semiconductor materials, devices, and processes 7. : analytical and diagnostic techniques for semiconductor materials, devices, and processes/7 symposium : fall 2007 Electrochemical Society meeting : ALTECH 07 symposium analytical techniques for semiconductor materials and process characterization 5 : symposium E3 diagnostics : Oct 2007, Washington, DC.
• シリーズタイトル: ECS Transactions ; 11 (no. 3)
• 出版事項: Pennington : Electrochemical Society
• 出版年月日等: c2007.
• 出版年（W3CDTF）: 2007
• 数量: viii, 394 p. : ill. ; 23 cm.
• 付属資料: With a CD-ROM.
• 並列タイトル等: Dielectric and semiconductor materials, devices, and processing; Title of CD-ROM: Analytical techniques for semiconductor materials and process characterization 5 : (ALTECH 2007) : vol. 10 no. 1
• 出版地（国名コード）: US
• NDLC: M17
• 一般注記: Papers.; "It is the seventh meeting in a series of symposia presenting (...) " -- pref.; Also contains a CD-ROM with the papers of the ALTECH 07 symposium Analytical Techniques for Semiconductor Materials and Process Characterization V, held as part of the Solid State Device Reseach Conference (ESSDERC) 2007 in Munich, Germany on September 13-14, 2007.
• 書誌注記: Includes bibliographical references and author index.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-08-544
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000009248597; http://id.ndl.go.jp/bib/000009248597
• 整理区分コード: 215