Analytical and diagnostic techniques for semiconductor materials, devices, and processes 7. : analytical and diagnostic techniques for semiconductor materials, devices, and processes/7 symposium : fall 2007 Electrochemical Society meeting : ALTECH 07 symposium analytical techniques for semiconductor materials and process characterization 5 : symposium E3 diagnostics : Oct 2007, Washington, DC. (ECS Transactions ; 11 (no. 3))

Analytical and diagnostic techniques for semiconductor materials, devices, and processes 7. : analytical and diagnostic techniques for semiconductor materials, devices, and processes/7 symposium : fall 2007 Electrochemical Society meeting : ALTECH 07 symposium analytical techniques for semiconductor materials and process characterization 5 : symposium E3 diagnostics : Oct 2007, Washington, DC.

(ECS Transactions ; 11 (no. 3))

Call No. (NDL): M17-08-544
Bibliographic ID of National Diet Library: 000009248597

Material type: 図書

Author: -

Publisher: Electrochemical Society

Publication date: c2007.

Material Format: Paper

Capacity, size, etc.: viii, 394 p. : ill. ; 23 cm.

NDC: -

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Notes on use

Note (General)：: Papers."It is the seventh meeting in a series of symposia presenting (...) " -- pref.Also contains a CD-ROM with the papers of the ALTECH 07 symposium...

Accompanying material：: With a CD-ROM.

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Paper

Material Type: 図書
ISBN: 9781566775694
9781566775793 (CD-ROM)
ISSN: 1938-6737 (online)
ISSN (series): 1938-5862 (print)
Title: Analytical and diagnostic techniques for semiconductor materials, devices, and processes 7. : analytical and diagnostic techniques for semiconductor materials, devices, and processes/7 symposium : fall 2007 Electrochemical Society meeting : ALTECH 07 symposium analytical techniques for semiconductor materials and process characterization 5 : symposium E3 diagnostics : Oct 2007, Washington, DC.
Series Title: ECS Transactions ; 11 (no. 3)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2007.
Publication Date (W3CDTF): 2007
Extent: viii, 394 p. : ill. ; 23 cm.
Accompanying material: With a CD-ROM.
Alternative Title: Dielectric and semiconductor materials, devices, and processing
Title of CD-ROM: Analytical techniques for semiconductor materials and process characterization 5 : (ALTECH 2007) : vol. 10 no. 1
Place of Publication (Country Code): US
NDLC: M17
Note (General): Papers.
"It is the seventh meeting in a series of symposia presenting (...) " -- pref.
Also contains a CD-ROM with the papers of the ALTECH 07 symposium Analytical Techniques for Semiconductor Materials and Process Characterization V, held as part of the Solid State Device Reseach Conference (ESSDERC) 2007 in Munich, Germany on September 13-14, 2007.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-08-544
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009248597
http://id.ndl.go.jp/bib/000009248597
Bibliographic Record Category (NDL): 215