Microelectromechanical systems -- materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices" : 2007 MRS fall meeting : symposium N, "materials, integration and technology for monolithic instruments 2" : Nov 2007, Boston, MA.

• 資料種別: 図書
• ISBN: 9781558999909
• タイトル: Microelectromechanical systems -- materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices" : 2007 MRS fall meeting : symposium N, "materials, integration and technology for monolithic instruments 2" : Nov 2007, Boston, MA.
• シリーズタイトル: Materials Research Society Symposia Proceedings ; 1052
• 著者標目: LaVan, David A.; Materials Research Society. Meeting (2007 : Boston, Mass.); Symposium on Microelectromechanical Systems -- Materials and Devices (2007 : Boston, Mass.)
• 出版事項: Warrendale : Materials Research Society
• 出版年月日等: c2008.
• 出版年（W3CDTF）: 2008
• 数量: xi, 325 p. : ill. ; 24 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Microelectromechanical systems -- Materials -- Congresses.; Microelectromechanical systems -- Congresses.
• LCC: TK7875
• NDLC: M17
• 一般注記: Selected papers.
• 書誌注記: Includes bibliographical references and indexes.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-08-1144
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000009352584; http://id.ndl.go.jp/bib/000009352584
• OCLC番号: 226035060; https://www.worldcat.org/oclc/226035060
• 整理区分コード: 215