Microelectromechanical systems -- materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices" : 2007 MRS fall meeting : symposium N, "materials, integration and technology for monolithic instruments 2" : Nov 2007, Boston, MA. (Materials Research Society Symposia Proceedings ; 1052)

Microelectromechanical systems -- materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices" : 2007 MRS fall meeting : symposium N, "materials, integration and technology for monolithic instruments 2" : Nov 2007, Boston, MA.

(Materials Research Society Symposia Proceedings ; 1052)

Call No. (NDL): M17-08-1144
Bibliographic ID of National Diet Library: 000009352584

Material type: 図書

Author: LaVan, David A.ほか

Publisher: Materials Research Society

Publication date: c2008.

Material Format: Paper

Capacity, size, etc.: xi, 325 p. : ill. ; 24 cm.

NDC: -

Notes on use

Note (General)：: Selected papers.

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Paper

Material Type: 図書
ISBN: 9781558999909
Title: Microelectromechanical systems -- materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A. : symposium DD, "microelectromechanical systems -- materials and devices" : 2007 MRS fall meeting : symposium N, "materials, integration and technology for monolithic instruments 2" : Nov 2007, Boston, MA.
Series Title: Materials Research Society Symposia Proceedings ; 1052
Author Heading: LaVan, David A.
Materials Research Society. Meeting (2007 : Boston, Mass.)
Symposium on Microelectromechanical Systems -- Materials and Devices (2007 : Boston, Mass.)
Publication, Distribution, etc.: Warrendale : Materials Research Society
Publication Date: c2008.
Publication Date (W3CDTF): 2008
Extent: xi, 325 p. : ill. ; 24 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Microelectromechanical systems -- Materials -- Congresses.
Microelectromechanical systems -- Congresses.
LCC: TK7875
NDLC: M17
Note (General): Selected papers.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-08-1144
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000009352584
http://id.ndl.go.jp/bib/000009352584
OCLC No.: 226035060
https://www.worldcat.org/oclc/226035060
Bibliographic Record Category (NDL): 215