Fundamental principles of optical lithography : the science of microfabrication / Chris Mack.

• 資料種別: 図書
• ISBN: 9780470018934; 9780470727300 (pbk.)
• タイトル: Fundamental principles of optical lithography : the science of microfabrication / Chris Mack.
• 著者標目: Mack, Chris A ( 01156763 )典拠
• 出版事項: Chichester, West Sussex, England : John Wiley & Sons; Hoboken, N.J., USA : John Wiley & Sons
• 出版年月日等: c2007.
• 出版年（W3CDTF）: 2007
• 数量: xvii, 515 p. : ill. ; 25 cm.
• 出版地（国名コード）: GB
• 本文の言語コード: eng
• 件名標目: Integrated circuits -- Design and construction.; Microlithography -- Industrial applications.; Circuits intégrés -- Conception et construction.; Microlithographie -- Applications industrielles.
• LCC: TK7874
• DDC: 621.3815/31
• NDLC: ND386
• 一般注記: Related URL: Table of contents only http: //www.loc.gov/catdir/enhancements/fy0804/2007044548-t.html.; Related URL: Publisher description http: //www.loc.gov/catdir/enhancements/fy0804/2007044548-d.html.; Related URL: Contributor biographical information http: //www.loc.gov/catdir/enhancements/fy0809/2007044548-b.html.
• 書誌注記: Includes bibliographical references and index.
• 所蔵機関: 国立国会図書館
• 請求記号: ND386-B12
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000009999357; http://id.ndl.go.jp/bib/000009999357
• LC control number: 2007044548; https://lccn.loc.gov/2007044548
• OCLC番号: 180190870; https://www.worldcat.org/oclc/180190870
• 目録規則: 英米目録規則
• 整理区分コード: 211