Fundamental principles of optical lithography : the science of microfabrication / Chris Mack.

• Material Type: 図書
• ISBN: 9780470018934; 9780470727300 (pbk.)
• Title: Fundamental principles of optical lithography : the science of microfabrication / Chris Mack.
• Author Heading: Mack, Chris A ( 01156763 )Authorities
• Publication, Distribution, etc.: Chichester, West Sussex, England : John Wiley & Sons; Hoboken, N.J., USA : John Wiley & Sons
• Publication Date: c2007.
• Publication Date (W3CDTF): 2007
• Extent: xvii, 515 p. : ill. ; 25 cm.
• Place of Publication (Country Code): GB
• Text Language Code: eng
• Subject Heading: Integrated circuits -- Design and construction.; Microlithography -- Industrial applications.; Circuits intégrés -- Conception et construction.; Microlithographie -- Applications industrielles.
• LCC: TK7874
• DDC: 621.3815/31
• NDLC: ND386
• Note (General): Related URL: Table of contents only http: //www.loc.gov/catdir/enhancements/fy0804/2007044548-t.html.; Related URL: Publisher description http: //www.loc.gov/catdir/enhancements/fy0804/2007044548-d.html.; Related URL: Contributor biographical information http: //www.loc.gov/catdir/enhancements/fy0809/2007044548-b.html.
• Note (Bibliography): Includes bibliographical references and index.
• Holding library: 国立国会図書館
• Call No.: ND386-B12
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000009999357; http://id.ndl.go.jp/bib/000009999357
• LC Control Number: 2007044548; https://lccn.loc.gov/2007044548
• OCLC No.: 180190870; https://www.worldcat.org/oclc/180190870
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 211