Alternative lithographic technologies : 24-26 February 2009 : San Jose, California, United States. : 2009 conference on alternative lithographic technologies : Feb 2009, San Jose, CA. (SPIE Proceedings ; 7271)
Alternative lithographic technologies : 24-26 February 2009 : San Jose, California, United States. : 2009 conference on alternative lithographic technologies : Feb 2009, San Jose, CA.
Papers."In previous years, this conference has gone by the name of 'Emerging Lithographic Technologies.' (...) This year, we have changed the name (.....
"In previous years, this conference has gone by the name of 'Emerging Lithographic Technologies.' (...) This year, we have changed the name (...) " -- introd.
書誌注記
Includes bibliographical references and author index.