Alternative lithographic technologies : 24-26 February 2009 : San Jose, California, United States. : 2009 conference on alternative lithographic technologies : Feb 2009, San Jose, CA. (SPIE Proceedings ; 7271)

Alternative lithographic technologies : 24-26 February 2009 : San Jose, California, United States. : 2009 conference on alternative lithographic technologies : Feb 2009, San Jose, CA.

(SPIE Proceedings ; 7271)

Call No. (NDL): M17-10-79
Bibliographic ID of National Diet Library: 000010270469

Material type: 図書

Author: SEMATECH, Inc.ほか

Publisher: SPIE

Publication date: c2009.

Material Format: Paper

Capacity, size, etc.: 2 parts : ill. ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers."In previous years, this conference has gone by the name of 'Emerging Lithographic Technologies.' (...) This year, we have changed the name (.....

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Paper

Material Type: 図書
ISBN (set): 9780819475244 (set)
ISSN (series): 0277-786X
Title: Alternative lithographic technologies : 24-26 February 2009 : San Jose, California, United States. : 2009 conference on alternative lithographic technologies : Feb 2009, San Jose, CA.
Series Title: SPIE Proceedings ; 7271
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7271.
Author Heading: SEMATECH, Inc.
Schellenberg, F. M., 1959-
La Fontaine, Bruno M.
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2009.
Publication Date (W3CDTF): 2009
Extent: 2 parts : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Extreme ultraviolet lithography -- Congresses.
Lithography, Electron beam -- Congresses.
Microlithography -- Industrial applications -- Congresses.
Masks (Electronics) -- Congresses.
NDLC: M17
Note (General): Papers.
"In previous years, this conference has gone by the name of 'Emerging Lithographic Technologies.' (...) This year, we have changed the name (...) " -- introd.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-10-79
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010270469
http://id.ndl.go.jp/bib/000010270469
OCLC No.: 355813963
https://www.worldcat.org/oclc/355813963
Bibliographic Record Category (NDL): 215