Papers."In 1983, the VDI/VDE society decided to organize an annual conference (...) In 2005 the conference name was changed to 'European Mask and Lith...
"In 1983, the VDI/VDE society decided to organize an annual conference (...) In 2005 the conference name was changed to 'European Mask and Lithography Conference, EMLC, ' (...) " -- foreword.
書誌注記
Includes bibliographical references and author index.