25th European mask and lithography conference : 12-15 January 2009 : Dresden, Germany. : EMLC 2009 : EMLC2009 : Jan 2009, Dresden, Germany. (SPIE Proceedings ; 7470)

25th European mask and lithography conference : 12-15 January 2009 : Dresden, Germany. : EMLC 2009 : EMLC2009 : Jan 2009, Dresden, Germany.

(SPIE Proceedings ; 7470)

Call No. (NDL): M17-10-505
Bibliographic ID of National Diet Library: 000010437996

Material type: 図書

Author: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)ほか

Publisher: SPIE

Publication date: c2009.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) : ill. ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers."In 1983, the VDI/VDE society decided to organize an annual conference (...) In 2005 the conference name was changed to 'European Mask and Lith...

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Paper

Material Type: 図書
ISBN: 9780819477705
ISSN (series): 0277-786X
Title: 25th European mask and lithography conference : 12-15 January 2009 : Dresden, Germany. : EMLC 2009 : EMLC2009 : Jan 2009, Dresden, Germany.
Series Title: SPIE Proceedings ; 7470
Title Heading: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7470.
Author Heading: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)
Behringer, Uwe F. W.
European Mask and Lithography Conference (25th : 2009 : Dresden, Germany)
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2009.
Publication Date (W3CDTF): 2009
Extent: 1 v. (various pagings) : ill. ; 28 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Integrated circuits -- Masks -- Congresses.
Microlithography -- Congresses.
NDLC: M17
Note (General): Papers.
"In 1983, the VDI/VDE society decided to organize an annual conference (...) In 2005 the conference name was changed to 'European Mask and Lithography Conference, EMLC, ' (...) " -- foreword.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-10-505
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010437996
http://id.ndl.go.jp/bib/000010437996
OCLC No.: 424523420
https://www.worldcat.org/oclc/424523420
Bibliographic Record Category (NDL): 215