Instrumentation, metrology, and standards for nanomanufacturing 3 : 3-5 August 2009 : San Diego, California, United States. : 2009 SPIE conference, instrumentation, metrology, and standards for nanomanufacturing 3 : Aug 2009, San Diego, CA. (SPIE Proceedings ; 7405)
Instrumentation, metrology, and standards for nanomanufacturing 3 : 3-5 August 2009 : San Diego, California, United States. : 2009 SPIE conference, instrumentation, metrology, and standards for nanomanufacturing 3 : Aug 2009, San Diego, CA.