数量xii, 398 p. : ill. ; 28 cm.
並列タイトル等Frontiers of characterization and metrology for nanoelectronics: 2009 : Albany, New York 11-15 May 2009
一般注記Papers.
"The 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics was held (...) This was the seventh conference in a series; (...) " -- pref.
書誌注記Includes bibliographical references and indexes.