Ultra clean processing of semiconductor surfaces 9 : UCPSS 2008 : 9th international symposium on ultra clean processing of semiconductor surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008. : Sep 2008, Bruges, Belgium.

• 資料種別: 図書
• ISSN（シリーズ）: 0377-6883.
• タイトル: Ultra clean processing of semiconductor surfaces 9 : UCPSS 2008 : 9th international symposium on ultra clean processing of semiconductor surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008. : Sep 2008, Bruges, Belgium.
• シリーズタイトル: Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 145-146
• 著者標目: Interuniversity Micro-Electronics Center.; Mertens, Paul.; Meuris, Marc.; Heyns, Marc.; International Symposium on Ultra Clean Processing of Semiconductor Surfaces (9th : 2008 : Bruges, Belgium)
• 出版事項: Stafa-Zurich : Trans Tech Publications
• 出版年月日等: c2009.
• 出版年（W3CDTF）: 2009
• 数量: xvi, 400 p. : ill. ; 25 cm.
• 出版地（国名コード）: CH
• 本文の言語コード: eng
• 件名標目: Semiconductors -- Surfaces -- Congresses.; Ultra clean processing.; Semiconductor surfaces.; Silicon surfaces.; UCPSS.
• DDC: 537.622
• NDLC: M17
• 一般注記: Papers.; " (...) (UCPSS) is a bi-annual conference organized by IMEC since 1992."-- pref.
• 書誌注記: Includes bibliographical references and indexes.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-10-1971
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000010693829; http://id.ndl.go.jp/bib/000010693829
• OCLC番号: 317250839; https://www.worldcat.org/oclc/317250839
• 整理区分コード: 215