Ultra clean processing of semiconductor surfaces 9 : UCPSS 2008 : 9th international symposium on ultra clean processing of semiconductor surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008. : Sep 2008, Bruges, Belgium. (Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 145-146)

Ultra clean processing of semiconductor surfaces 9 : UCPSS 2008 : 9th international symposium on ultra clean processing of semiconductor surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008. : Sep 2008, Bruges, Belgium.

(Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 145-146)

Call No. (NDL): M17-10-1971
Bibliographic ID of National Diet Library: 000010693829

Material type: 図書

Author: Interuniversity Micro-Electronics Center.ほか

Publisher: Trans Tech Publications

Publication date: c2009.

Material Format: Paper

Capacity, size, etc.: xvi, 400 p. : ill. ; 25 cm.

NDC: -

View All

Notes on use

Note (General)：: Papers." (...) (UCPSS) is a bi-annual conference organized by IMEC since 1992."-- pref.

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
ISSN (series): 0377-6883.
Title: Ultra clean processing of semiconductor surfaces 9 : UCPSS 2008 : 9th international symposium on ultra clean processing of semiconductor surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008. : Sep 2008, Bruges, Belgium.
Series Title: Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 145-146
Author Heading: Interuniversity Micro-Electronics Center.
Mertens, Paul.
Meuris, Marc.
Heyns, Marc.
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (9th : 2008 : Bruges, Belgium)
Publication, Distribution, etc.: Stafa-Zurich : Trans Tech Publications
Publication Date: c2009.
Publication Date (W3CDTF): 2009
Extent: xvi, 400 p. : ill. ; 25 cm.
Place of Publication (Country Code): CH
Text Language Code: eng
Subject Heading: Semiconductors -- Surfaces -- Congresses.
Ultra clean processing.
Semiconductor surfaces.
Silicon surfaces.
UCPSS.
DDC: 537.622
NDLC: M17
Note (General): Papers.
" (...) (UCPSS) is a bi-annual conference organized by IMEC since 1992."-- pref.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-10-1971
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000010693829
http://id.ndl.go.jp/bib/000010693829
OCLC No.: 317250839
https://www.worldcat.org/oclc/317250839
Bibliographic Record Category (NDL): 215