Gettering and defect engineering in semiconductor technology 13 : GADEST 2009 : proceedings of the 13th international autumn meeting, Dollnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009. : GADEST conference : Sep 2009, Dollnsee-Schorfheide, Germany. (Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 156-158)
Gettering and defect engineering in semiconductor technology 13 : GADEST 2009 : proceedings of the 13th international autumn meeting, Dollnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009. : GADEST conference : Sep 2009, Dollnsee-Schorfheide, Germany.
(Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 156-158)