図書

Gettering and defect engineering in semiconductor technology 13 : GADEST 2009 : proceedings of the 13th international autumn meeting, Dollnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009. : GADEST conference : Sep 2009, Dollnsee-Schorfheide, Germany. (Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 156-158)

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Gettering and defect engineering in semiconductor technology 13 : GADEST 2009 : proceedings of the 13th international autumn meeting, Dollnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009. : GADEST conference : Sep 2009, Dollnsee-Schorfheide, Germany.

(Diffusion and Defect Data, Solid State Data ; Diffusion and Defect Data Part B Solid State Phenomena ; 156-158)

Call No. (NDL)
M17-10-1976
Bibliographic ID of National Diet Library
000010694022
Material type
図書
Author
IHP Frankfurt (Oder)ほか
Publisher
Trans Tech Publications
Publication date
c2010.
Material Format
Paper
Capacity, size, etc.
xiv, 592 p. : ill. ; 25 cm.
NDC
-
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Papers." (...) the GADEST conference is biennially organized." -- pref.

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Paper

Material Type
図書
ISSN (series)
0377-6883.
Publication, Distribution, etc.
Publication Date
c2010.
Publication Date (W3CDTF)
2010
Extent
xiv, 592 p. : ill. ; 25 cm.