Reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices 9 : 25-26 January 2010 : San Francisco, California, United States. : reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices conference : Jan 2010, San Francisco, CA.

• 資料種別: 図書
• ISBN: 9780819479884
• ISSN（シリーズ）: 0277-786X
• タイトル: Reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices 9 : 25-26 January 2010 : San Francisco, California, United States. : reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices conference : Jan 2010, San Francisco, CA.
• シリーズタイトル: SPIE Proceedings ; 7592
• タイトル標目: Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7592.
• 著者標目: Kullberg, Richard C.; Ramesham, Rajeshuni.
• 出版事項: Bellingham : SPIE
• 出版年月日等: c2010.
• 出版年（W3CDTF）: 2010
• 数量: 1 v. (various pagings) : ill. ; 28 cm.
• 並列タイトル等: Reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices 9 : 26 January 2010 : San Francisco, California, United States; SPIE photonics west
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Microelectromechanical systems -- Reliability -- Congresses.; Microelectromechanical systems -- Testing -- Congresses.; Microelectronic packaging -- Congresses.
• LCC: TK7875
• NDLC: M17
• 一般注記: Papers.; "This conference has been held for over 10 consecutive years in various forms through the SPIE." -- introd.
• 書誌注記: Includes bibliographical references and author index.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-10-3692
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000010903435; http://id.ndl.go.jp/bib/000010903435
• OCLC番号: 642855931; https://www.worldcat.org/oclc/642855931
• 整理区分コード: 215