図書

Reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices 9 : 25-26 January 2010 : San Francisco, California, United States. : reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices conference : Jan 2010, San Francisco, CA. (SPIE Proceedings ; 7592)

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Reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices 9 : 25-26 January 2010 : San Francisco, California, United States. : reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices conference : Jan 2010, San Francisco, CA.

(SPIE Proceedings ; 7592)

Call No. (NDL)
M17-10-3692
Bibliographic ID of National Diet Library
000010903435
Material type
図書
Author
Kullberg, Richard C.ほか
Publisher
SPIE
Publication date
c2010.
Material Format
Paper
Capacity, size, etc.
1 v. (various pagings) : ill. ; 28 cm.
NDC
-
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Papers."This conference has been held for over 10 consecutive years in various forms through the SPIE." -- introd.

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Paper

Material Type
図書
ISBN
9780819479884
ISSN (series)
0277-786X
Title
Reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices 9 : 25-26 January 2010 : San Francisco, California, United States. : reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices conference : Jan 2010, San Francisco, CA.
Series Title
SPIE Proceedings ; 7592
Title Heading
Proceedings of SPIE -- the International Society for Optical Engineering ; v. 7592.
Author Heading
Kullberg, Richard C.
Ramesham, Rajeshuni.
Publication, Distribution, etc.
Bellingham : SPIE
Publication Date
c2010.
Publication Date (W3CDTF)
2010