Proceedings of: precision engineering and mechatronics supporting the semiconductor industry : 2012 summer topical meeting : June 24 to 26, 2012 : Lawrence Berkeley National Laboratory : Berkeley, California, USA : Jun 2012, Berkeley, CA.

• 資料種別: 図書
• ISBN: 9781887706605
• タイトル: Proceedings of: precision engineering and mechatronics supporting the semiconductor industry : 2012 summer topical meeting : June 24 to 26, 2012 : Lawrence Berkeley National Laboratory : Berkeley, California, USA : Jun 2012, Berkeley, CA.
• 著者標目: American Society for Precision Engineering.
• 出版事項: Raleigh : American Society for Precision Engineering
• 出版年月日等: [2012].
• 出版年（W3CDTF）: 2012
• 数量: xii, 3-116 p.
• 形態の詳細: ill. (some col.)
• 大きさ: 28 cm.
• その他のタイトル: Proceedings : ASPE 2012 summer topical meeting : precision engineering and mechatronics supporting the semiconductor industry : June 2012.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• NDLC: M17
• 対象利用者: 一般
• 一般注記: Program, an abstract and papers.; "Volume 53" -- backcover.; "This topical meeting is a second version of the highly successful meeting held in Spring 2008, Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment." -- foreword.; "A full-day tutorial on Sunday, June 24 will give participants (...) The 2012 Summer Topical Meeting will span 2 days with technical presentations, (...)" -- foreword.
• 書誌注記: Includes bibliographical references and author index.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-13-299
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 023894236; http://id.ndl.go.jp/bib/023894236
• 目録規則: 英米目録規則
• 整理区分コード: 215