Proceedings of: precision engineering and mechatronics supporting the semiconductor industry : 2012 summer topical meeting : June 24 to 26, 2012 : Lawrence Berkeley National Laboratory : Berkeley, California, USA : Jun 2012, Berkeley, CA.

• Material Type: 図書
• ISBN: 9781887706605
• Title: Proceedings of: precision engineering and mechatronics supporting the semiconductor industry : 2012 summer topical meeting : June 24 to 26, 2012 : Lawrence Berkeley National Laboratory : Berkeley, California, USA : Jun 2012, Berkeley, CA.
• Author Heading: American Society for Precision Engineering.
• Publication, Distribution, etc.: Raleigh : American Society for Precision Engineering
• Publication Date: [2012].
• Publication Date (W3CDTF): 2012
• Extent: xii, 3-116 p.
• Other physical details: ill. (some col.)
• Size: 28 cm.
• Additional Title: Proceedings : ASPE 2012 summer topical meeting : precision engineering and mechatronics supporting the semiconductor industry : June 2012.
• Place of Publication (Country Code): US
• Text Language Code: eng
• NDLC: M17
• Target Audience: 一般
• Note (General): Program, an abstract and papers.; "Volume 53" -- backcover.; "This topical meeting is a second version of the highly successful meeting held in Spring 2008, Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment." -- foreword.; "A full-day tutorial on Sunday, June 24 will give participants (...) The 2012 Summer Topical Meeting will span 2 days with technical presentations, (...)" -- foreword.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-13-299
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 023894236; http://id.ndl.go.jp/bib/023894236
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 215