Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VIII : 20 August 2014 : San Diego, California, United States : Aug 2014, San Diego, CA. (SPIE Proceedings ; 9173)
Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VIII : 20 August 2014 : San Diego, California, United States : Aug 2014, San Diego, CA.