Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VIII : 20 August 2014 : San Diego, California, United States : Aug 2014, San Diego, CA.

• Material Type: 図書
• ISBN: 9781628412000; 1628412003
• ISSN (series): 0277-786X
• Title: Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VIII : 20 August 2014 : San Diego, California, United States : Aug 2014, San Diego, CA.
• Series Title: SPIE Proceedings ; 9173
• Author Heading: Postek, Michael T.; Orji, Ndubuisi George.
• Publication, Distribution, etc.: Bellingham, Washington, USA : SPIE (出版)
• Publication Date: [2014]
• Publication Date (W3CDTF): 2014
• Extent: 1 volume (various pagings)
• Other physical details: illustrations (black and white)
• Size: 28 cm.
• Alternative Title: Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors 8 : 20 August 2014 : San Diego, California, United States; SPIE. optics + photonics
• Place of Publication (Country Code): US
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Nanostructured materials--Congresses.; Microfabrication--Congresses.; Nanotechnology--Congresses.; Instrumentation; Metrology; Nanomanufacturing; Optics; Semiconductors
• NDLC: M17
• Target Audience: 一般
• Note (General): Papers.
• Note (Bibliography): Includes bibliographical references and author index.
• Holding library: 国立国会図書館
• Call No.: M17-15-47
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 025940859; http://id.ndl.go.jp/bib/025940859
• OCLC No.: 898314177; https://www.worldcat.org/oclc/898314177
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 215