記事
Simultaneous high-frequency measurement of direct and inverse transverse piezoelectric coefficients of thin films using longitudinal vibration
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すぐに読む
CiNii Research
Simultaneous high-frequency measurement of direct and inverse transverse piezoelectric coefficients of thin films using longitudinal vibration
- 資料種別
- 記事
- 著者
- Akinori Tateyamaほか
- 出版者
- Elsevier BV
- 出版年
- 2023-05
- 資料形態
- デジタル
- 掲載誌名
- Sensors and Actuators A: Physical 354
- 掲載ページ
- p.114265-
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デジタル
- 資料種別
- 記事
- 著者標目
- 出版年月日等
- 2023-05
- 出版年(W3CDTF)
- 2023-05
- タイトル(掲載誌)
- Sensors and Actuators A: Physical
- 巻号年月日等(掲載誌)
- 354
- 掲載巻
- 354
- 掲載ページ
- 114265-
- 掲載年月日(W3CDTF)
- 2023-05
- ISSN(掲載誌)
- 09244247
- 出版事項(掲載誌)
- Elsevier BV
- 件名標目
- 対象利用者
- 一般
- DOI
- 10.1016/j.sna.2023.114265
- 作成日(W3CDTF)
- 2023-02-25
- 著作権情報
- https://www.elsevier.com/tdm/userlicense/1.0/http://www.elsevier.com/open-access/userlicense/1.0/https://doi.org/10.15223/policy-017https://doi.org/10.15223/policy-037https://doi.org/10.15223/policy-012https://doi.org/10.15223/policy-029https://doi.org/10.15223/policy-004
- 関連情報(URI)
- 参照
- Orientation Dependence of Transverse Piezoelectric Properties of Epitaxial BaTiO<sub>3</sub> FilmsDependency of direct and inverse transverse piezoelectric properties on composition in self-polarized epitaxial (K<sub><i>x</i></sub>Na<sub>1−<i>x</i></sub>)NbO<sub>3</sub>films grown via a hydrothermal methodCharacterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS ApplicationsPiezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficientsA piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern<i>In Situ</i> XRD Observation of Crystal Deformation of Piezoelectric (K,Na)NbO<sub>3</sub> Thin FilmsHighly c-axis-oriented monocrystalline Pb(Zr, Ti)O<sub>3</sub> thin films on si wafer prepared by fast cooling immediately after sputter depositionNoncontact and simultaneous measurement of the <i>d</i>33 and <i>d</i>31 piezoelectric strain coefficientsHigh electromechanical strain and enhanced temperature characteristics in lead-free (Na,Bi)TiO3–BaTiO3 thin films on Si substratesEffect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K<sub>0.88</sub>Na<sub>0.12</sub>)NbO<sub>3</sub> filmElectromechanical finite element modelling for dynamic analysis of a cantilevered piezoelectric energy harvester with tip mass offset under base excitationsConcurrent wafer-level measurement of longitudinal and transverse effective piezoelectric coefficients (<i>d</i>33,f and <i>e</i>31,f) by double beam laser interferometryThermal stability of self-polarization in a (K,Na)NbO<sub>3</sub> film prepared by the hydrothermal methodExperiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducersMethod to Further Improve Sensitivity for High-Order Vibration Mode Mass Sensors With Stepped CantileversComparison of effective transverse piezoelectric coefficients<i>e</i><sub>31,f</sub>of Pb(Zr,Ti)O<sub>3</sub>thin films between direct and converse piezoelectric effectsGood piezoelectricity of self-polarized thick epitaxial (K,Na)NbO3 films grown below the Curie temperature (240 °C) using a hydrothermal methodReview of piezoelectric energy harvesting system and application of optimization techniques to enhance the performance of the harvesting systemAn industrial and applied review of new MEMS devices featuresGiant Piezoelectricity on Si for Hyperactive MEMSAdvances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applicationsFerroelectric thin films for micro-sensors and actuators: a reviewThe wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin filmsEffects of starting materials on the deposition behavior of hydrothermally synthesized {1 0 0} -oriented epitaxial (K,Na)NbO3 thick films and their ferroelectric and piezoelectric propertiesA review of vibration-based MEMS piezoelectric energy harvestersPiezoelectric Thin Films for Sensors, Actuators, and Energy HarvestingThin Film Piezoelectrics for MEMSDESIGN CONSIDERATIONS FOR MEMS-SCALE PIEZOELECTRIC MECHANICAL VIBRATION ENERGY HARVESTERSThin-Film Piezoelectric Materials For a Better Energy Harvesting MEMSCrystallographic contributions to piezoelectric properties in PZT thin filmsPiezoelectric and dielectric properties of ceramics in the system potassium–sodium niobateDevelopment of a high power piezoelectric characterization system and its application for resonance/antiresonance mode characterizationHigh-Power Piezoelectric Vibration Characteristics of Textured SrBi2Nb2O9 Ceramics
- 連携機関・データベース
- 国立情報学研究所 : CiNii Research
- 提供元機関・データベース
- Crossref科学研究費助成事業データベース