Orientation Dependence of Transverse Piezoelectric Properties of Epitaxial BaTiO<sub>3</sub> Films
Dependency of direct and inverse transverse piezoelectric properties on composition in self-polarized epitaxial (K<sub><i>x</i></sub>Na<sub>1−<i>x</i></sub>)NbO<sub>3</sub>films grown via a hydrothermal method
Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications
Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients
A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern
<i>In Situ</i> XRD Observation of Crystal Deformation of Piezoelectric (K,Na)NbO<sub>3</sub> Thin Films
Highly c-axis-oriented monocrystalline Pb(Zr, Ti)O<sub>3</sub> thin films on si wafer prepared by fast cooling immediately after sputter deposition
Noncontact and simultaneous measurement of the <i>d</i>33 and <i>d</i>31 piezoelectric strain coefficients
High electromechanical strain and enhanced temperature characteristics in lead-free (Na,Bi)TiO3–BaTiO3 thin films on Si substrates
Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K<sub>0.88</sub>Na<sub>0.12</sub>)NbO<sub>3</sub> film
Electromechanical finite element modelling for dynamic analysis of a cantilevered piezoelectric energy harvester with tip mass offset under base excitations
Concurrent wafer-level measurement of longitudinal and transverse effective piezoelectric coefficients (<i>d</i>33,f and <i>e</i>31,f) by double beam laser interferometry
Thermal stability of self-polarization in a (K,Na)NbO<sub>3</sub> film prepared by the hydrothermal method
Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers
Method to Further Improve Sensitivity for High-Order Vibration Mode Mass Sensors With Stepped Cantilevers
Comparison of effective transverse piezoelectric coefficients<i>e</i><sub>31,f</sub>of Pb(Zr,Ti)O<sub>3</sub>thin films between direct and converse piezoelectric effects
Good piezoelectricity of self-polarized thick epitaxial (K,Na)NbO3 films grown below the Curie temperature (240 °C) using a hydrothermal method
Review of piezoelectric energy harvesting system and application of optimization techniques to enhance the performance of the harvesting system
An industrial and applied review of new MEMS devices features
Giant Piezoelectricity on Si for Hyperactive MEMS
Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Ferroelectric thin films for micro-sensors and actuators: a review
The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films
Effects of starting materials on the deposition behavior of hydrothermally synthesized {1 0 0} -oriented epitaxial (K,Na)NbO3 thick films and their ferroelectric and piezoelectric properties
A review of vibration-based MEMS piezoelectric energy harvesters
Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting
Thin Film Piezoelectrics for MEMS
DESIGN CONSIDERATIONS FOR MEMS-SCALE PIEZOELECTRIC MECHANICAL VIBRATION ENERGY HARVESTERS
Thin-Film Piezoelectric Materials For a Better Energy Harvesting MEMS
Crystallographic contributions to piezoelectric properties in PZT thin films
Piezoelectric and dielectric properties of ceramics in the system potassium–sodium niobate
Development of a high power piezoelectric characterization system and its application for resonance/antiresonance mode characterization
High-Power Piezoelectric Vibration Characteristics of Textured SrBi2Nb2O9 Ceramics