イオン液体BMIM-PF₆イオンビーム照射によるガラス基板の表面改質 (シリコン材料・デバイス)
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- Material Type
- 記事
- Author/Editor
- 竹内 光明濱口 拓也龍頭 啓充 他
- Series Title
- Alternative Title
- Surface Modification of Glass Substrate by Ion Beam Irradiation of Ionic Liquid BMIM-PF₆
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 112(337):2012.12.7
- Volume
- 112
- Issue
- 337