単結晶ダイヤモンドウェハのプラズマCVDによる高速・大面積成長(特集ダイヤモンド成長)

Journal name: 日本結晶成長学会誌 = Journal of the Japanese Association for Crystal Growth 39(4):2012

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Material Type: 記事
Title: 単結晶ダイヤモンドウェハのプラズマCVDによる高速・大面積成長
Author/Editor: 山田英明
Series Title: 特集ダイヤモンド成長
Author Heading: 山田英明
Alternative Title: Present Status of Progresses and Understanding in Techniques to Fabricate Large Size Wafers of Single-crystal Diamond with Sufficiently High Growth Rate
Periodical title: 日本結晶成長学会誌 = Journal of the Japanese Association for Crystal Growth
No. or year of volume/issue: 39(4):2012
Volume: 39
Issue: 4
Pages: 170-178
Publication date of volume/issue (W3CDTF): 2012
ISSN (Periodical Title): 0385-6275
ISSN-L (Periodical Title): 0385-6275
Publication (Periodical Title): 大阪 : 日本結晶成長学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-339
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024259981
http://id.ndl.go.jp/bib/024259981
Bibliographic Record Category (NDL): 632