Deep Levels Generated by Thermal Oxidation in n-Type 4H-SiC

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Material Type: 記事
Title: Deep Levels Generated by Thermal Oxidation in n-Type 4H-SiC
Author/Editor: Koutarou Kawahara
Jun Suda
Tsunenobu Kimoto
Author Heading: Koutarou Kawahara
Jun Suda
Tsunenobu Kimoto
Periodical title: Applied physics express : APEX
No. or year of volume/issue: 6(5):2013.5
Volume: 6
Issue: 5
Pages: 051301-1-4
Publication date of volume/issue (W3CDTF): 2013-05
ISSN (Periodical Title): 1882-0778
ISSN-L (Periodical Title): 1882-0778
Publication (Periodical Title): Tokyo : Japan Society of Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z78-A526
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024520022
http://id.ndl.go.jp/bib/024520022
Bibliographic Record Category (NDL): 632