ポリメタクリル酸メチル樹脂の水素プラズマ曝露と低エネルギーアルゴンイオンビームによるエッチング(小特集第53回真空に関する連合講演会論文集(1))

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Material Type: 記事
Title: ポリメタクリル酸メチル樹脂の水素プラズマ曝露と低エネルギーアルゴンイオンビームによるエッチング
Author/Editor: 吉村智
幾世和将
杉本敏司他
Series Title: 小特集第53回真空に関する連合講演会論文集(1)
Author Heading: 吉村智
幾世和将
杉本敏司
Alternative Title: Hydrogen Plasma Exposure of Polymethylmethacrylate and Etching by Low Energy Ar⁺ Ion Beam
Periodical title: Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue: 56(4):2013.4
Volume: 56
Issue: 4
Pages: 129-132
Publication date of volume/issue (W3CDTF): 2013-04
ISSN (Periodical Title): 1882-2398
ISSN-L (Periodical Title): 1882-2398
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024633811
http://id.ndl.go.jp/bib/024633811
Bibliographic Record Category (NDL): 632