MEMS開発における解析支援技術

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Material Type: 記事
Title: MEMS開発における解析支援技術
Author/Editor: 水津美晴
浅海和雄
望月俊輔
Author Heading: 水津美晴
浅海和雄
望月俊輔
Alternative Title: Simulation Technology for Micro-Electro-Mechanical-Systems (MEMS) Development
Periodical title: Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue: 56(10):2013.10
Volume: 56
Issue: 10
Pages: 409-416
Publication date of volume/issue (W3CDTF): 2013-10
ISSN (Periodical Title): 1882-2398
ISSN-L (Periodical Title): 1882-2398
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024944304
http://id.ndl.go.jp/bib/024944304
Bibliographic Record Category (NDL): 632