サファイア基板のメカニカルポリシングに及ぼす定盤表面性状の影響 : 定盤表面性状とスラリーフロー並びに研磨レートの関係
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- Material Type
- 記事
- Author/Editor
- 畝田 道雄福田 有哉伊藤 康昭 他
- Alternative Title
- Effects of platen surface texture in sapphire-mechanical polishing : Relationship between platen surface texture, slurry flow, and removal rate
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 58(5)=381:2014.5
- Volume
- 58
- Issue
- 5
- Sequential issue number
- 381