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雑誌 電子資料芝浦工業大学研究報告
Volume number2014
炭素系硬質コーテッド...

炭素系硬質コーテッド工具のリサイクル技術としての高密度酸素プラズマアッシング (理工系編 VOL.58 NO.1 2014)

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炭素系硬質コーテッド工具のリサイクル技術としての高密度酸素プラズマアッシング

(理工系編 VOL.58 NO.1 2014)

Call No. (NDL)
YH247-709
Bibliographic ID of National Diet Library
026581378
Material type
記事
Author
相澤 龍彦ほか
Publisher
東京 : 芝浦工業大学
Publication date
2014
Material Format
Recording Media
Journal name
芝浦工業大学研究報告 The research reports of Shibaura Institute of Technology / 芝浦工業大学 編 2014
Publication Page
p.17-26
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Recording Media

Material Type
記事
Author/Editor
相澤 龍彦
杉田 良雄
Alternative Title
High Density Oxygen Plasma Ashing for Recycling and Reuse of DLC-Coated Tools and Dies
Periodical title
芝浦工業大学研究報告 The research reports of Shibaura Institute of Technology / 芝浦工業大学 編
No. or year of volume/issue
2014
Pages
17-26
Publication date of volume/issue (W3CDTF)
2014