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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 嘉田 守宏
- Author Heading
- Alternative Title
- Prospect for Development on 3D-Integration Technology and R&D result of Functionally Innovative 3D-Integrated Circuit (Dream Chip) Technology in FY2010
- Periodical title
- 半導体・集積回路技術シンポジウム講演論文集 = Proceedings of Symposium on Semiconductors and Integrated Circuits Technology
- No. or year of volume/issue
- 75:2011.7.7・8
- Volume
- 75
- Pages
- 19-22
- Publication date of volume/issue (W3CDTF)
- 2011-07