Volume number75:2011.7.7・8
三次元集積化技術の開...

三次元集積化技術の開発動向と「ドリームチッププロジェクト」の研究開発成果2010

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三次元集積化技術の開発動向と「ドリームチッププロジェクト」の研究開発成果2010

Call No. (NDL)
Z43-2637
Bibliographic ID of National Diet Library
026725820
Material type
記事
Author
嘉田 守宏
Publisher
東京 : 電気化学会電子材料委員会
Publication date
2011-07
Material Format
Paper
Journal name
半導体・集積回路技術シンポジウム講演論文集 = Proceedings of Symposium on Semiconductors and Integrated Circuits Technology 75:2011.7.7・8
Publication Page
p.19-22
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Paper

Material Type
記事
Author/Editor
嘉田 守宏
Author Heading
Alternative Title
Prospect for Development on 3D-Integration Technology and R&D result of Functionally Innovative 3D-Integrated Circuit (Dream Chip) Technology in FY2010
Periodical title
半導体・集積回路技術シンポジウム講演論文集 = Proceedings of Symposium on Semiconductors and Integrated Circuits Technology
No. or year of volume/issue
75:2011.7.7・8
Volume
75
Pages
19-22
Publication date of volume/issue (W3CDTF)
2011-07