Microstructure Formation on Polytetrafluoroethylene (PTFE) and Perfluoroalkoxy (PFA) Bulk Plates by a Magnetron Enhanced Reactive Ion Etching System

Digital data available（Japan Link Center）

CiNii Research

Microstructure Formation on Polytetrafluoroethylene (PTFE) and Perfluoroalkoxy (PFA) Bulk Plates by a Magnetron Enhanced Reactive Ion Etching System

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Digital
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: Microstructure Formation on Polytetrafluoroethylene (PTFE) and Perfluoroalkoxy (PFA) Bulk Plates by a Magnetron Enhanced Reactive Ion Etching System
Author/Editor: Hirofumi NABESAWA
Takeshi HITOBO
Toyohisa ASAJI
Takashi ABE
Minoru SEKI
Author Heading: Hirofumi NABESAWA
Takeshi HITOBO
Toyohisa ASAJI
Takashi ABE
Minoru SEKI
Periodical title: Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue: 60(5):2017.5
Volume: 60
Issue: 5
Pages: 176-181
Publication date of volume/issue (W3CDTF): 2017-05
ISSN (Periodical Title): 1882-2398
ISSN-L (Periodical Title): 1882-2398
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 028222360
http://id.ndl.go.jp/bib/028222360
Bibliographic Record Category (NDL): 632