原子層堆積装置およびエッチング装置を組み合わせた極微細パターンニング形成 (特集 薄膜成長の最前線)
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- Material Type
- 記事
- Author/Editor
- 勝沼 隆幸久松 亨木原 嘉英本田 昌伸
- Series Title
- Alternative Title
- New Patterning Technology by Integrating Atomic Layer Deposition Process to the Etching Flow
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 38(5):2017.5
- Volume
- 38
- Issue
- 5