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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 縄稚 典生伊藤 幸一井鷺 洋介吉田 善明岡本 圭司中谷 達行
- Series Title
- Alternative Title
- Characterization of Carbon Thin Films Prepared by High Power Impulse Magnetron Sputtering
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 60(9):2017.9
- Volume
- 60
- Issue
- 9