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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 石井 雄大中田 陽介時実 悠瀧田 佑馬金森 義明南出 泰亜羽根 一博
- Series Title
- Alternative Title
- Fabrication of MEMS-driven Wire Grid Polarizers in THz Region and Evaluation of the Optical Characteristics
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 137(11):2017.11
- Volume
- 137
- Issue
- 11