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THz波用MEMS駆動ワイヤグリッド偏光子の製作と光学特性評価 (特集 メタマテリアル・プラズモニクス)

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THz波用MEMS駆動ワイヤグリッド偏光子の製作と光学特性評価(特集 メタマテリアル・プラズモニクス)

Call No. (NDL)
Z16-B380
Bibliographic ID of National Diet Library
028668316
Material type
記事
Author
石井 雄大ほか
Publisher
東京 : 電気学会
Publication date
2017-11
Material Format
Paper
Journal name
電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 137(11):2017.11
Publication Page
p.407-414
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Paper Digital

Material Type
記事
Author/Editor
石井 雄大
中田 陽介
時実 悠
瀧田 佑馬
金森 義明
南出 泰亜
羽根 一博
Alternative Title
Fabrication of MEMS-driven Wire Grid Polarizers in THz Region and Evaluation of the Optical Characteristics
Periodical title
電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
No. or year of volume/issue
137(11):2017.11
Volume
137
Issue
11