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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 村上 洋甲木 昭雄佐島 隆生吉田 一朗浜野 康雄本田 裕内山 晃介
- Alternative Title
- Development of a System for 3-D Micro Metrology Using an Ultra-Small Diameter Optical Fiber Probe
- Periodical title
- 光計測シンポジウム論文集
- No. or year of volume/issue
- 2017
- Pages
- 27-30
- Publication date of volume/issue (W3CDTF)
- 2017
- Publication (Periodical Title)
- 東京 : 日本光学測定機工業会