X線を用いた熱化学異方性エッチングによるPTFEの微細加工プロセスの検討
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- Material Type
- 記事
- Author/Editor
- 山口 明啓木戸 秀樹竹内 雅耶内海 裕一
- Alternative Title
- Study on Microfabrication of Polytetrafluoethylene using X-ray-induced Pyrochemical Anisotropic Etching
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 137(12):2017.12
- Volume
- 137
- Issue
- 12
- Pages
- 417-421