低温Al-Al熱圧着ウェハレベル真空封止接合における薄膜Sn層の役割
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- Material Type
- 記事
- Author/Editor
- 佐藤 史朗福士 秀幸江刺 正喜田中 秀治
- Alternative Title
- Role of Thin Sn Layer for Low Temperature Al-Al Thermo-compression Bonding of Wafer-level Hermetic Sealing
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 137(12):2017.12
- Volume
- 137
- Issue
- 12
- Pages
- 432-437