シリコン単結晶のトライボロジーと微構造変化 (平成29年度研究成果概要)

シリコン単結晶のトライボロジーと微構造変化

(平成29年度研究成果概要)

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Material Type: 記事
Title: シリコン単結晶のトライボロジーと微構造変化
Author/Editor: 高木誠
岩田博之
坂公恭
Series Title: 平成29年度研究成果概要
Author Heading: 高木誠
岩田博之
坂公恭
Periodical title: 愛知工業大学総合技術研究所研究報告 / 研究報告編集委員会編
No. or year of volume/issue: (20):2018.9
Issue: 20
Pages: 106-108
Publication date of volume/issue (W3CDTF): 2018-09
ISSN (Periodical Title): 1344-9672
ISSN-L (Periodical Title): 1344-9672
Publication (Periodical Title): 豊田 : 愛知工業大学総合技術研究所
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: シリコン単結晶
摩擦・摩耗
透過型電子顕微鏡
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-B826
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 029311990
http://id.ndl.go.jp/bib/029311990
Bibliographic Record Category (NDL): 632