炭酸アルキレンによるフォトレジストの剥離機構 : 水とプルロニック系界面活性剤の添加効果
Digital data available（Japan Link Center）
Begin reading now
CiNii Research
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceDigitalYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 半澤 将希大日向 秀収川野 伸一赤松 允顕酒井 健一酒井 秀樹
- Alternative Title
- Removal Mechanism of Photoresist in Alkylene Carbonates with Water and Pluronic Surfactant
- Periodical title
- 色材協会誌 = Journal of the Japan Society of Colour Material
- No. or year of volume/issue
- 92(6):2019.6
- Volume
- 92
- Issue
- 6
- Pages
- 181-185