単結晶窒化ガリウム(GaN)基板の高速高精度加工法の開発 : 紫外線援用テープ研削法の提案

Journal name: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 63(11)=447:2019.11

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Material Type: 記事
Title: 単結晶窒化ガリウム(GaN)基板の高速高精度加工法の開発 : 紫外線援用テープ研削法の提案
Author/Editor: 鷹巣良史
嶋田慶太
水谷正義
厨川常元
Author Heading: 鷹巣良史
嶋田慶太
水谷正義
厨川常元
Alternative Title: Development of high-speed and high-accurate manufacturing of gallium nitride : Suggestion of UV assist tape grinding method
Periodical title: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue: 63(11)=447:2019.11
Volume: 63
Issue: 11
Sequential issue number: 447
Pages: 569-574
Publication date of volume/issue (W3CDTF): 2019-11
ISSN (Periodical Title): 0914-2703
ISSN-L (Periodical Title): 0914-2703
Publication (Periodical Title): 東京 : 砥粒加工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: gallium nitride
grinding with abrasive tape
ultraviolet
hydroxyl radical
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1147
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 030080368
http://id.ndl.go.jp/bib/030080368
Bibliographic Record Category (NDL): 632