AI・IoT時代に向けた三次元集積実装技術の研究開発 (特集 三次元積層集積デバイスによる半導体集積回路技術の進展と展望)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 菊地 克弥
- Series Title
- Author Heading
- Alternative Title
- R&D of 3D-IC Technology for the AI・IoT Era
- Periodical title
- 表面と真空 = Vacuum and surface science / 日本表面科学会, 日本真空学会 編
- No. or year of volume/issue
- 62(11):2019.11
- Volume
- 62
- Issue
- 11