c面サファイアおよびSi(111)基板上への六方晶BN薄膜のCVD成長 (電子ディスプレイ)

c面サファイアおよびSi(111)基板上への六方晶BN薄膜のCVD成長

(電子ディスプレイ)

Journal name: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 119(385):2020.1.23・24

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Material Type: 記事
Title: c面サファイアおよびSi(111)基板上への六方晶BN薄膜のCVD成長
Author/Editor: 名嘉眞朝泰
松下一貴
渡邊泰良
小南裕子
原和彦
Series Title: 電子ディスプレイ
Author Heading: 名嘉眞朝泰
松下一貴
渡邊泰良
小南裕子
原和彦
Alternative Title: CVD growth of h-BN thin films on c-plane sapphire and Si(111) substrates
Periodical title: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue: 119(385):2020.1.23・24
Volume: 119
Issue: 385
Pages: 1-4
Publication date of volume/issue (W3CDTF): 2020-01
ISSN (Periodical Title): 0913-5685
ISSN-L (Periodical Title): 0913-5685
Publication (Periodical Title): 東京 : 電子情報通信学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: 六方晶窒化ホウ素
CVD
薄膜
カソードルミネッセンス
深紫外発光
hexagonal boron nitride
thin film
cathodoluminescence
deep-ultraviolet luminescence
NDLC: ZN33
Target Audience: 一般
Report No. (Article): IDY2020-2
Holding library: 国立国会図書館
Call No.: Z16-940
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 030249586
http://id.ndl.go.jp/bib/030249586
Bibliographic Record Category (NDL): 632