新規なエアロゾル化ガスデポジションによるアルミナ絶縁膜の作製 (特集 外場印加による粉体プロセスの新展開)
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- Material Type
- 記事
- Author/Editor
- 渕田 英嗣谷本 久典目 義雄
- Series Title
- Alternative Title
- Fabrication Alumina Film with High Breakdown Field Strength by New Aerosol Gas Deposition Technology
- Periodical title
- 粉体および粉末冶金 = Journal of the Japan Society of Powder and Powder Metallurgy : 粉体粉末冶金協会誌 / 粉体粉末冶金協会 編
- No. or year of volume/issue
- 67(4):2020.4
- Volume
- 67
- Issue
- 4