Si単結晶のマイクロ...

Si単結晶のマイクロトライボロジーに及ぼす雰囲気と温度の影響

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Si単結晶のマイクロトライボロジーに及ぼす雰囲気と温度の影響

Call No. (NDL)
Z17-314
Bibliographic ID of National Diet Library
030644910
Material type
記事
Author
高木 誠ほか
Publisher
仙台 : 日本金属学会 ; 1937-
Publication date
2020-09
Material Format
Paper
Journal name
日本金属学会誌 = The journal of the Japan Institute of Metals and Materials 84(9):2020.9
Publication Page
p.304-309
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Paper Digital

Material Type
記事
Author/Editor
高木 誠
長江 昂亮
木内 亮介
岩田 博之
坂 公恭
Alternative Title
Effects of Atmosphere and Temperature on Microtribology between Silicon Single Crystals
Periodical title
日本金属学会誌 = The journal of the Japan Institute of Metals and Materials
No. or year of volume/issue
84(9):2020.9
Volume
84
Issue
9
Pages
304-309