X線光電子分光における時空間計測/解析技術の開発 : NAP-HARPESから4D-XPSへ (特集 Society 5.0時代を創出する異種材料集積半導体デバイス)
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- Material Type
- 記事
- Author/Editor
- 豊田 智史山本 知樹吉村 真史住田 弘祐三根生 晋町田 雅武吉越 章隆鈴木 哲横山 和司大橋 雄二黒澤 俊介鎌田 圭佐藤 浩樹山路 晃広吉野 将生 他
- Series Title
- Alternative Title
- Development of Spatiotemporal Measurement and Analysis Techniques in X-ray Photoelectron Spectroscopy : From NAP-HARPES to 4D-XPS
- Periodical title
- 表面と真空 = Vacuum and surface science / 日本表面科学会, 日本真空学会 編
- No. or year of volume/issue
- 64(2):2021.2
- Volume
- 64
- Issue
- 2