金属有機化合物分解法による酸化物半導体薄膜の成長
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- Material Type
- 記事
- Author/Editor
- 西本 尚己
- Author Heading
- Alternative Title
- Growth of oxide semiconductor thin films by metal-organic decomposition
- Periodical title
- 島根県産業技術センター研究報告 = Report of the Shimane Institute for Industrial Technology
- No. or year of volume/issue
- (57):2021.3
- Issue
- 57
- Pages
- 10-14
- Publication date of volume/issue (W3CDTF)
- 2021-03